EMA-400
Desk Top Mask Aligner
FEATURE
*Economical, Compact & Hi-Level Performance
* Viewing fused image of two alignment marks in the field of view.
* Integrator lens for exposure.
* LED illuminator
APPLICATION
(Micromachine development in R&D center and university)
*Acuator, Pressure Sensor, Acceleration Sensor, Power Device, etc.
* Exposure for Flip Chip/BGA/CSP.
* Exposure for Optical/High Speed Communication Components.
*Economical, Compact & Hi-Level Performance
* Viewing fused image of two alignment marks in the field of view.
* Integrator lens for exposure.
* LED illuminator
APPLICATION
(Micromachine development in R&D center and university)
*Acuator, Pressure Sensor, Acceleration Sensor, Power Device, etc.
* Exposure for Flip Chip/BGA/CSP.
* Exposure for Optical/High Speed Communication Components.
| Alignment Scope | |
| Objectives separation | 15 to 75mm |
| Total magnification | 100X |
| Illuminator for observation | Green LED (λ=540nm) |
| X, Y Movement range of stage | ±5 mm |
| θ Adjustment | ±5° |
| Utility | |
| Power source for main
body and mercury lamp |
AC 100V 50/60Hz 15A |
| Vacuum source | Below 21.3 Kpa (-80 Kpa from atmospheric pressure) |
| Pressure Source | More than 0.2MPa (N² gas or Dry clean air) |
| Exposure Unit | |
| Lens | Integrator lens |
| Mercury lamp | 250W ultra-high pressure vapor mercury lamp |
| Effective exposure area | Max φ100 mm |
| Intensity distribution | ±5% or less |
| Intensity of illumination | 20 mW/cm² (405 nm) |
| Exposure time control | Digital timer and rotary solenoid |
| Mercury Lamp Lighting Unit | AC 100V |
Download PDF leaflet EMA-400