Desk Top Mask Aligner

*Economical, Compact & Hi-Level Performance
* Viewing fused image of two alignment marks in the field of view.
* Integrator lens for exposure.
* LED illuminator
(Micromachine development in R&D center and university)
*Acuator, Pressure Sensor, Acceleration Sensor, Power Device, etc.
* Exposure for Flip Chip/BGA/CSP.
* Exposure for Optical/High Speed Communication Components.
Alignment Scope
Objectives separation 15 to 75mm
Total magnification 100X
Illuminator for observation Green LED (λ=540nm)
X, Y Movement range of stage ±5 mm
θ Adjustment ±5°
Power source for main body
and mercury lamp
AC 100V 50/60Hz 15A
Vacuum source Below 21.3 Kpa (-80 Kpa from atmospheric pressure)
Pressure Source More than 0.2MPa (N² gas or Dry clean air)
Exposure Unit
Lens Integrator lens
Mercury lamp 250W ultra-high pressure vapor mercury lamp
Effective exposure area Max φ100 mm
Intensity distribution ±5% or less
Intensity of illumination 20 mW/cm² (405 nm)
Exposure time control Digital timer and rotary solenoid
Mercury Lamp Lighting Unit AC 100V
Download PDF leaflet  EMA-400