High-precision non-contact depth measuring microscope

HISOMET realizes non-contact, high-precision height/depth measurement with simple operation, observing the surface of measuring point.
HISOMET-II is a non-contact depth measuring microscope that has been designed based on an optical type focal point detection system. Adopting precise focus indicator, it's possible to measure height, depth, steps, etc. with observing the surface of measuring point, by simply coinciding the halves of an index graticule. Since there are no concern for physical damages such as distortion, blow or nicks to a specimen because of non-contact system, HISOMET is optimum for measuring electronic components such as ICs or high-precision processing parts.
Microscope Stand
& Bracket
TravelCoarse Adjustable140mm
Fine Adjustable25mm or 10mm
Height of specimen150mm
IlluminatorReflectingIllumination with Index Graticule
3W White LED
Transmitted* (Option)Telecentric Illumination
3W White LED
Z-axis measuring 1μm, 0.5μm and 0.1μm(option)reading / 25mm or 10mm travel
Z-axis measuring Accuracy3σ= 1μm (using 40× Objective)
Viewing HeadErected TrinocularBinocular with TV C-mount Tube
ObjectivesPLM, PLLWDM, SPLM series 3×, 5×, 10×, 20×, 40×, 50×, 100×
EyepieceNWF10XField Number φ16mm with Offset Hair Line Crossed Reticle
Measuring StageTravel (X-Y)50×50・100×50・100×100・150×150・200×100・200×200・300×150・300×300mm
Measuring AccuracyX:(4+0.02L)μm, Y:(4+0.02L)μm,
L:Travel Distance (mm)
OptionsCCD Camera, Monitor, Measurement Software
Download PDF leaflet  DH2